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1 μm process

Semiconductor manufacturing process

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Lab · Class 8–12Using a Microscope

The 1 μm process refers to the minimum size that could be reliably produced. The smallest transistors and other circuit elements on a chip made with this process were around 1 micrometers wide.

The earliest MOSFET with a 1 μm NMOS channel length was fabricated by a research team led by Robert H. Dennard, Hwa-Nien Yu and F.H. Gaensslen at the IBM T.J. Watson Research Center in 1974.

Products featuring 1.0 μm manufacturing process

  • NTT introduced the 1 μm process for its DRAM memory chips, including its 64k in 1979 and 256k in 1980.
  • NEC's 1 Mbit DRAM memory chip was manufactured with the 1 μm process in 1984.
  • Intel 80386 CPU launched in 1985 was manufactured using this process.
  • Intel uses this process on the CHMOS III-E technology.
  • Intel uses this process on the CHMOS IV technology.

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