1.5 μm process
Semiconductor manufacturing process
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Through Micrometre
The 1.5 μm process refers to the minimum size that could be reliably produced. The smallest transistors and other circuit elements on a chip made with this process were around 1.5 micrometers wide.
Products featuring 1.5 μm manufacturing process
- NEC's 64 kbit SRAM memory chip introduced the 1.5 μm process in 1981.
- Intel 80286 CPU launched in 1982 was manufactured using this process.
- Intel introduced a 64 kbit DRAM memory chip using a 1.5 μm CMOS process in 1983.
- Ricoh RF5C164 is a 1.5 μm silicon-gate CMOS sound chip used in the Sega CD video game console, released in 1991.
- The Amiga Advanced Graphics Architecture (initially sold in 1992) included chips such as Lisa that were manufactured using a 1.5 μm CMOS process.
- Intel used the 1.5-micron process on the HMOS-III technology.
- Intel used the 1.4-micron process on the HMOS II-E technology.
- Intel used the 1.5-micron process on the CHMOS III technology.

