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Physical vapor deposition

Method of coating solid surfaces with thin films

  • 5 min read
  • 3 chapters

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Through Thin film, Balloon and Corrosion

The source material is, unavoidably, also deposited on most other surfaces in the vacuum chamber, including the fixtures holding the parts. This is called overshoot.

Examples

  • Cathodic arc deposition: A high-power electric arc discharged at the target (source) material blasts away some into highly ionized vapor to be deposited onto the workpiece.
  • Electron-beam physical vapor deposition: The material to be deposited is heated to a high vapor pressure by electron bombardment in "high" vacuum and is transported by diffusion to be deposited by condensation on the (cooler) workpiece.
  • Evaporative deposition: The material to be deposited is heated to a high vapor pressure by electrical resistance heating in "high" vacuum.
  • Close-space sublimation: The material and substrate are placed close to one another and radiatively heated.
  • Pulsed laser deposition: A high-power laser ablates material from the target into a vapor.
  • Thermal laser epitaxy: A continuous-wave laser evaporates individual, free-standing elemental sources which then condense upon a substrate.
  • Sputter deposition: A glow discharge (usually localized around the target by a magnet) bombards the material, sputtering some away as a vapor for subsequent deposition.
  • Pulsed electron deposition: A highly energetic pulsed electron beam ablates material from the target, generating a plasma stream under nonequilibrium conditions.
  • Sublimation sandwich method: This method is used for growing crystals such as silicon carbide (SiC).

Metrics and testing

Various techniques to characterize thin films can be used to measure the physical properties of PVD coatings, such as:

  • Calo testing: measures coating thickness
  • Nanoindentation: measures hardness of thin-film coatings
  • Pin-on-disc testing: measures wear and friction coefficient
  • Scratch testing: measures coating adhesion
  • X-ray micro-analysis measures structural features and heterogeneity of elemental composition of the growth surfaces

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