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Passivation (chemistry)

Physico-chemical processes contributing to protect a surface against oxidation

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Through Redox, Corrosion and Silicon

When exposed to air, many metals naturally form a hard, relatively inert surface layer, usually an oxide (termed the "native oxide layer") or a nitride, that serves as a passivation layer. In the case of silver, the dark tarnish is a passivation layer of silver sulfide formed from reaction with environmental hydrogen sulfide. (In contrast, metals such as iron oxidize readily to form a rough porous coating of rust that adheres loosely and sloughs off readily, allowing further oxidation.) The passivation layer of oxide markedly slows further oxidation and corrosion in room-temperature air for aluminium, beryllium, chromium, zinc, titanium, and silicon (a metalloid). The inert surface layer formed by reaction with air has a thickness of about 1.5 nm for silicon, 1–10 nm for beryllium, and 1 nm initially for titanium, growing to 25 nm after several years. Similarly, for aluminium, it grows to about 5 nm after several years.

In the context of the semiconductor device fabrication, such as silicon MOSFET transistors and solar cells, surface passivation refers not only to reducing the chemical reactivity of the surface but also to eliminating the dangling bonds and other defects that form electronic surface states, which impair performance of the devices. Surface passivation of silicon usually consists of high-temperature thermal oxidation.

Mechanisms

There has been much interest in determining the mechanisms that govern the increase of thickness of the oxide layer over time. Some of the important factors are the volume of oxide relative to the volume of the parent metal, the mechanism of oxygen diffusion through the metal oxide to the parent metal, and the relative chemical potential of the oxide. Boundaries between micro grains, if the oxide layer is crystalline, form an important pathway for oxygen to reach the unoxidized metal below. For this reason, vitreous oxide coatings – which lack grain boundaries – can retard oxidation. The conditions necessary, but not sufficient, for passivation are recorded in Pourbaix diagrams. Some corrosion inhibitors help the formation of a passivation layer on the surface of the metals to which they are applied. Some compounds, dissolved in solutions (chromates, molybdates) form non-reactive and low solubility films on metal surfaces.

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